http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140086669-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
filingDate 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_430fe6f6310944717d373fec9d7d8ccd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb9428bf8dc893a38cb246739b500ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4984491cd8120fd673842a8b57a9e515
publicationDate 2014-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140086669-A
titleOfInvention Etchant composition for metal oxide layer
abstract The present invention relates to an etchant composition for a metal oxide film, and more particularly, to a process for etching a metal oxide film (transparent oxide semiconductor) quickly and uniformly by including nitric acid, hydrochloric acid, To an etchant composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160102662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200039367-A
priorityDate 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3720192
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22011661
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410677221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557048
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485929
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11947683
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451062621
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454041818
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91617960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449340856
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266

Total number of triples: 35.