| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_142d981bd6c180968f769e0da8f620da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_070875329d2add3d65875c6c1b27108a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate |
2012-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29021c682a0956b1d0ff317c346c3b17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0c938579384731e1e0a2b9d4d2ec2e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e251a5f1b06b10bb43059f580ac612d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a800f27af95912c12a6c3b34d131310 |
| publicationDate |
2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140084432-A |
| titleOfInvention |
Method for manufacturing metal-oxide thin film using low temperature process, thin film, and electric device thereof |
| abstract |
Disclosed is an ultraviolet lamp apparatus for sintering an oxide thin film using a solution process. The ultraviolet lamp unit includes a sample loading unit and a housing having a chamber space and a structure for surrounding the sample loading unit. The UV lamp unit includes an ultraviolet lamp unit for irradiating ultraviolet rays to the lower part of the chamber space. And an inert gas injecting part for injecting the inert gas into the sample mounted on the sample mounting part in one area of the housing. |
| priorityDate |
2012-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |