http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140083880-A

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filingDate 2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d2acb0f61cd5893082ebef7a2dc0ff
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publicationDate 2014-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140083880-A
titleOfInvention Photosensitive resin composition
abstract A method of forming a pattern comprising a photosensitive resin composition capable of forming a pattern having excellent storage stability and excellent in precision at a low exposure dose and a polysiloxane film using the photosensitive resin composition and a method of forming a polysiloxane film formed using the photosensitive resin composition And a pattern formed by the pattern. (A) a photosensitive resin composition comprising at least one member selected from the group consisting of a hydrolyzable silane compound, a hydrolyzate of a hydrolyzable silane compound, and condensates thereof, and (B) a photoacid generator or photoacid generator (C) a compound which generates an imidazole compound of a specific structure by light is added.
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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415787411
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454410634
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87202753
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420398177
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2758875
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414326734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID262936
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID328225
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734852
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415772498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457203572
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21894366
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415743501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415994536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423558424

Total number of triples: 323.