| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2012-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b885d0d21ce81acb97dd95ad51fb996
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_198e601c60c434db2e9d3b90cc6d0385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42b7e85a2f73a1f81f62bdb8a378f6ed |
| publicationDate |
2014-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140080542-A |
| titleOfInvention |
Method of forming film |
| abstract |
The present invention provides a method for producing a film, and a method for producing a film of the present invention is a method for producing a film by applying a photocurable composition containing a polymerizable monomer, a photopolymerization initiator, and a photosensitive gas- A step of forming a film; Contacting the mold with the coating film; Irradiating the coating film with light through a mold to cure the coating film and generate gas in the coating film; And a step of releasing the mold from the coating film after irradiating the coating film with light to form a film having a predetermined pattern shape on the substrate, wherein when the coating film is irradiated with light, the polymerizable monomer Is higher than the reaction rate of the gas generating reaction of the photosensitive gas generating agent in the coating film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9631068-B2 |
| priorityDate |
2011-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |