| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G53-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G53-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-00 |
| filingDate |
2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5527249275ce6b483ce0e5cb61541fcf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_397979e20ae95235fd1562f8de99e1f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5635b77a01cb43cfb01daf1a2eec1d88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b11c4c636e43f22c593d5b237007936
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7dc796800f074e0ea411303d3b4e46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_797599e0620c0bd14db8559587540ab4 |
| publicationDate |
2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140075019-A |
| titleOfInvention |
Device for supplying organic metal compound |
| abstract |
The feeding device has two columnar containers (1,1 ') and a communicating tube (5) connecting the inside of the container (1,1') at its lower end. The vessel (1, 1 ') is filled with a solid organometallic compound at room temperature. A gas introduction pipe 2 for introducing a carrier gas into the container 1 is provided in an upper portion of the container 1. A gas lead-out pipe 3 for introducing a carrier gas containing an organometallic compound is provided on the top of the container 1 '. |
| priorityDate |
2006-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |