| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31504 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2012-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1a9f53b3909fe4bff7091e85364e5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_986c7afb2116770433e5c3a225913a54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ba7b215ff6ec205b4a61d9c5a69209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac9cc0038401fa29188613eb3d9a310c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de362a6f4261fa964aa91f0cb9e9e0e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_861004cbbd8e893d486c707f55ffafc3 |
| publicationDate |
2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140072192-A |
| titleOfInvention |
Underlay film composition for imprints and method of forming pattern and pattern formation method using the same |
| abstract |
The present invention provides pattern-forming properties and line edge roughness of the resulting substrate. (A) and a solvent (B), wherein the compound (A) comprises a group (Ka) capable of covalently bonding and / or interacting with a substrate, and a covalent bond with the curable composition for imprinting (Z) calculated from (Formula 1) is not less than 3.8 and a molecular weight is not less than 400: (Equation 1) S ounice parameter = (total Number of atoms) / (number of carbon atoms-number of oxygen atoms) |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395943-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170117586-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170033385-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170108137-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10246605-B2 |
| priorityDate |
2011-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |