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filingDate 2012-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140072121-A
titleOfInvention Mold blank, master mold, copy mold, and method for manufacturing mold blank
abstract 1. A mold blank having a hard mask layer, wherein the hard mask layer has a composition containing chromium, nitrogen and oxygen, and wherein the content of nitrogen varies continuously or stepwise in the layer thickness direction, Has a content change structure changing continuously or stepwise in a direction substantially opposite to the nitrogen in the layer thickness direction.
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