| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa80eed27901ac84139c7a7109c21e17 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02502
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02378
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02576 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b221a9cb4a07967c1d14eb89fb8216a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5ad9f841ec66d4038ebbf04ba584a42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_903f68e983d787b1d4297b907109ca79 |
| publicationDate |
2014-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140070013-A |
| titleOfInvention |
Epitaxial wafer and method for fabricating the same |
| abstract |
An epitaxial wafer according to an embodiment of the present invention includes a substrate, an epitaxial structure including a buffer layer formed on the substrate and an active layer formed on the buffer layer, wherein the active layer has a surface defect density of 0.1 / cm 2 Or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190026472-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170006799-A |
| priorityDate |
2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |