http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140067904-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2013-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd6b9d0f9c4f086cca5768a6f099a6ac |
publicationDate | 2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20140067904-A |
titleOfInvention | How to make plated sculptures |
abstract | assignment Provided is a method of forming a plating articulation capable of stably adhering to a substrate, the width of which is larger than the width of the bottom (the side in contact with the substrate surface) facing the bottom. Solution A composite film composed of a lower layer film and an upper layer film made of a positive photoresist composition is formed on a substrate and the dissolution rate R L of the lower layer film after exposure to the alkali developer is made larger than the dissolution rate R U of the upper layer film after exposure . The ratio R L / R U of the dissolution rate R L to the dissolution rate R U is preferably greater than 1 and not greater than 100. |
priorityDate | 2012-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 360.