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filingDate 2012-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dfb91531ba4f9d30cc4ab04c88fc8ee
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publicationDate 2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140067257-A
titleOfInvention Manufacturing method of flexible X-ray detector and radiation detecting device having flexible X-ray detector
abstract The present invention relates to a manufacturing method of a flexible X-ray detector and a radiation detecting apparatus having a flexible X-ray detector, wherein in a manufacturing method of an X-ray detector, a plurality of pixel-type image sensors are arranged on an auxiliary substrate on which a sacrificial layer for selective etching is formed, An image sensor array step of attaching PDMS (PolyDimethylsiloxane) to the upper part thereof and removing the auxiliary substrate through etching to manufacture a PDMS stamp in which the plurality of pixel type image sensors are arranged; A main substrate manufacturing step of preparing a flexible substrate using a polymer resin containing a scintillator and forming a plurality of electrode lines on the flexible substrate; A coupling step of coupling the PDMS stamp arranged with the image sensor on the flexible substrate so that the plurality of pixel type image sensors are connected to a plurality of electrode lines of the flexible substrate; And an X-ray detector manufacturing step of removing the PDMS stamp to form an image sensor on the flexible substrate. And a flexible X-ray CT scanner manufactured by the method. According to the present invention, it is possible to eliminate the blurring and spreading phenomenon of the outer part of the X-ray image and to eliminate the distortion of the image, Thereby providing a radiation detecting apparatus for displaying radiation.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10408948-B2
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