http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140063732-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-44 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-44 |
filingDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc90ffac9983a75b353d13b0760e642c |
publicationDate | 2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20140063732-A |
titleOfInvention | METHOD AND APPARATUS FOR MANUFACTURING SAMPLE FOR DIAGNOSING MICROSCAPOR |
abstract | The present invention relates to a method for producing a microstructure diagnosis, particularly a sample for transmission electron microscopy (TEM), scanning electron microscopy or X-ray absorption spectroscopy, A high energy beam 3 is irradiated to a plane-parallel disc 1 which is flat along the surfaces 2a and 2b so that the beam 3 removes the material, Depressions 5a and 5b extending parallel to the central disc surface 4 are formed on the two surfaces 2a and 2b respectively and two depressions extending to both sides of the central disc surface are formed, The longitudinal axes of the depressions when projected from the longitudinal axis on the surface intersect at a predetermined angle of preferably> 0 °, preferably> 10 °, preferably> 20 °, preferably> 30 °, In advance, The electron beam of minimum thickness-transparent material portion is held as a sample between the protrusion when seen in a vertical plane to the central disc. The invention also relates to a correspondingly formed apparatus. |
priorityDate | 2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.