| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C13-00 |
| filingDate |
2012-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de8d50227a3be3fef66382d9c7c1c85d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23472662a9e98090c8a7c5c6a24c0f29 |
| publicationDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140063505-A |
| titleOfInvention |
Liquid agent application device and liquid agent application method |
| abstract |
The liquid agent applying device 1 is provided with a substrate supply section R1 on which a substrate supply magazine 5 for accommodating a substrate 4 before application of the liquid agent Q is provided and a substrate supply magazine An application head 14 for applying the liquid agent Q to the substrate 4 extracted from the substrate 5 transferred to the work position and a substrate 4 for holding the substrate 4 coated with the liquid agent by the application head 14 And a substrate recovery unit R2 on which the accommodating magazine 5 is installed. The substrate supply unit R1 and the substrate recovery unit R2 are arranged in parallel in the vertical direction. |
| priorityDate |
2011-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |