| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67178 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C13-00 |
| filingDate |
2012-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23472662a9e98090c8a7c5c6a24c0f29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de8d50227a3be3fef66382d9c7c1c85d |
| publicationDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140063504-A |
| titleOfInvention |
Liquid agent application device and liquid agent application method |
| abstract |
The liquid agent applying device 1 includes a substrate supply part R1 where a substrate supplying magazine 5 for accommodating a substrate 4 before a liquid agent is applied and a liquid supply device Q for supplying a substrate 4, And a substrate recovery unit R2 provided with a substrate recovery magazine 5 for holding a substrate 4 on which a liquid agent is applied. In this liquid agent applying device 1, when the substrate supplying magazine 5 provided on the substrate supplying part is replaced with a new substrate supplying magazine 5, the substrate returning magazine 5 And the substrate supplying magazine 5 installed in the substrate supplying section R1 has been moved to the substrate collecting section R2 as the substrate collecting magazine 5 to be used subsequently and then the substrate supplying section R1 A new substrate feeding magazine 5 is provided. |
| priorityDate |
2011-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |