| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80 |
| filingDate |
2012-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_917780be4d2da4d61f400c2b6d491d1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3f5a68e077697be0f02e89f80dc5721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2bf3be70c366978eb28c443608c0838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47bd4492b79d2996bce917d3bd8ceac6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f8ff5e442dec7079d66e9e57dae4f44 |
| publicationDate |
2014-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140050936-A |
| titleOfInvention |
Photomask and manufacturing method thereof |
| abstract |
The present invention provides a photomask and a method of manufacturing the same. In this photomask, the light shielding pattern is not damaged in the cleaning process using ammonia water by the etching stopper film covering the side wall of the light shielding pattern, so that the change in CD of the light shielding pattern can be minimized. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190032934-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150122957-A |
| priorityDate |
2012-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |