| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e149d6b6f16cc85e6966689fe7f96bd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38 |
| filingDate |
2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b928784508e6e553db8c6b1cc064ffa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8722b6e8dab5870d3f58d231d299e51b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7580433055da34ef06aac670e5fb39b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1df84e3bb3199d975aa9e41b7fda049 |
| publicationDate |
2014-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140048062-A |
| titleOfInvention |
Photomask for improving resolving power and productivity of a flat panel display device and method for manufacturing the same |
| abstract |
A photomask capable of overcoming the marginal resolution of an exposure apparatus for a flat panel display using a composite wavelength and capable of improving productivity and a method of manufacturing the same are disclosed. A photomask according to an embodiment of the present invention includes a transparent portion; A semi-transmissive film pattern formed on the phase-inverted low-light-transmitting film pattern and the phase-inverted low-light-transmitting film pattern and having a relatively higher etch rate than the phase-inverted low-light-transmitting film pattern, Shielding portion; And a phase inverted low light-transmissive portion interposed between the transparent portion and the light-shielding portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9733569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017182052-A |
| priorityDate |
2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |