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filingDate 2012-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a54f2e5490398167abd5749d70f9903
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publicationDate 2014-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140045353-A
titleOfInvention Manufacturing method and manufacturing apparatus of organic electroluminescent element
abstract The shadow mask which has a plate-shaped rotating body which rotates and rotates about a rotating shaft, and the opening part is formed in the said rotating body is located in the position which opposes the said conveyance part, and is adjacent to the said conveyance part. Intervening in the vicinity of the substrate between nozzles of the deposition source arranged, and discharging the constituent layer forming material of the organic EL film vaporized from the nozzle while rotating the shadow mask so as to follow the movement of the substrate. The manufacturing method of the organic electroluminescent element which forms the structural layer of an organic electroluminescent film on the surface opposite to the said conveyance part.
priorityDate 2011-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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