| abstract |
The present invention relates to an antireflective coating composition comprising a crosslinking agent, at least one chromophore group and at least one hydroxyl and / or carboxyl group, and an additive, wherein the additive further has a structure of formula (1) , At least one arylene-hydroxyl moiety, Y is selected from a carboxylate anion or a sulfonate anion, R 2 , and R 3 are independently unsubstituted C 1 -C 8 alkyl, substituted C 1 -C 8 alkyl, aryl and arylene-hydroxyl; X 1 , X 2 and X 3 are independently selected from direct valence bonds and C 1 -C 8 alkylene groups, where n = 1, 2 or 3. The invention further relates to a method of use of the composition. |