http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140033503-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C2230-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C2220-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C29-023 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C18-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C27-009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F01D5-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04C27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04C18-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04C25-02 |
| filingDate | 2012-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2126921bb59cf6d17f519c7621685662 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dbad139dfb144ac712fcc0aea2b1e68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab5fdd8517c25e95311f4c4e967471da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62c75fb076349f71f97b6bb2dd401d1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e47921bf29a410b4ec72a3a258010694 |
| publicationDate | 2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140033503-A |
| titleOfInvention | Rotation mechanism of the gas exhaust pump, its manufacturing method, and gas exhaust pump provided with the rotation mechanism, and its manufacturing method |
| abstract | There is provided a rotation mechanism in which the safety of rotation can be ensured and the amount of seal gas used can be suppressed even when the clearance between the rotary shaft and the seal housing is significantly narrowed as compared with the prior art. The rotating mechanism of the present invention comprises a rotating shaft (105) and a seal housing (108). The rotary shaft 105 and the seal housing 108 are disposed by providing a predetermined gap 117. A PFA film represented by the chemical formula (1) is provided on at least one of the outer surface 119 of the rotary shaft 105 and the inner surface 118 of the seal housing 108. [ The PFA film 120 provided on at least one surface of the rotary shaft 105 and the seal housing 108 (collectively referred to as a " rotary mechanism member ") is formed on the wall surface forming at least the gap 117 of the rotary mechanism member After the PFA is coated, it is formed through a process of melting and re-melting so that a high smoothness is imparted to the free surface thereof. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114812199-A |
| priorityDate | 2011-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.