| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4cd40a53f4740c9adda45b87b64e3d13 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2995-0027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2905-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2105-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2043-585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2995-0018 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2012-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96480d148f43961aeb0b4e1181f8184c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1357c6c5ac2ca418f24d1515f581da02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cdf9ed8ee244a5f10f27932e4eb3a3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_538dd5fa4e374b8fda53b9e2bf75c2d0 |
| publicationDate |
2014-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140027281-A |
| titleOfInvention |
Light absorbing material for alignment marking |
| abstract |
An imprint lithography template having an alignment mark with a superabsorbent material. The alignment marks are not sensitive to the effect of liquid application and can provide stability and increase the contrast to the alignment system while filling the liquid imprint of the template structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180102936-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10353304-B2 |
| priorityDate |
2011-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |