http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140024906-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0769 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-124 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-149 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C22-52 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-00 |
| filingDate | 2012-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64196e7cd030f22c20d9071e238903d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef98f18a9ee8a6d800f3db238396c069 |
| publicationDate | 2014-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140024906-A |
| titleOfInvention | The manufacturing method of the laminated body which has a process liquid for migration suppression layer formation, and a migration suppression layer. |
| abstract | An object of this invention is to provide the process liquid for migration suppression layer formation for forming the migration suppression layer which suppresses migration of copper ion between wirings, and improves insulation reliability between wirings. The process liquid for migration suppression layer formation of this invention is a process liquid for forming the migration suppression layer which suppresses ion migration in a copper wiring or a copper alloy wiring, contains an azole compound and water, and dissolved oxygen amount is 7.0 ppm It is as follows. |
| priorityDate | 2011-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.