Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e221394359ebc8ef05b87c2093095274 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02466 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-54373 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
filingDate |
2011-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3273e1e4b8969ed2d1abab12ac960bf2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_696354dc825ac9f7e744775797eda33e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df7002ff8e378e24c717ef6487e40a75 |
publicationDate |
2014-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20140022768-A |
titleOfInvention |
Miniaturized Integrated Microelectromechanical Systems (MEMS) Optical Sensor Array |
abstract |
The present invention describes a method and apparatus for driving and multiplexing sensing using an array of sensing elements. The present invention can be used for label-free detection of biological and chemical agents in robust and miniaturized packages. The present invention integrates photonics, CMOS electronics and micro / nano system technologies and allows for multi-analyte sensing in the same package. Preferred driving methods are magnetic thin films and preferred sensing methods are optical using interference means. |
priorityDate |
2010-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |