http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140022768-A

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filingDate 2011-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3273e1e4b8969ed2d1abab12ac960bf2
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publicationDate 2014-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140022768-A
titleOfInvention Miniaturized Integrated Microelectromechanical Systems (MEMS) Optical Sensor Array
abstract The present invention describes a method and apparatus for driving and multiplexing sensing using an array of sensing elements. The present invention can be used for label-free detection of biological and chemical agents in robust and miniaturized packages. The present invention integrates photonics, CMOS electronics and micro / nano system technologies and allows for multi-analyte sensing in the same package. Preferred driving methods are magnetic thin films and preferred sensing methods are optical using interference means.
priorityDate 2010-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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