| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e49bfa42d30d71024dda30c38396a2c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02 |
| filingDate |
2006-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bbe33fe0a3bf2bc2131870b3ba9d6af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8139614e2a3e7852ac6600dd287d01e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_164b45e380c13378d9be41239daa47eb |
| publicationDate |
2014-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140022423-A |
| titleOfInvention |
Nanostructure manufacturing method and apparatus |
| abstract |
The present invention relates to a method for forming nanostructures or nanomaterials. The method includes providing a thermal control barrier 17 on a substrate 15 and forming nanostructures or nanomaterials. The method can be used to form carbon nanotubes by, for example, plasma chemical vapor deposition using a carbon containing gas plasma. The temperature of the substrate 15 may be maintained below 350 ° C. while the carbon nanotubes are formed. |
| priorityDate |
2005-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |