| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb9cd2af2f87dcf20b0fbbdfe79996e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2013-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b68f219320964a19967b540243dfdca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37d8d191d92327ac426d69d4718feda2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a9dd1f354c7746f16d795c1efec6630
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a43c34a7c71ca09744949f1fe7a31812 |
| publicationDate |
2014-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140016201-A |
| titleOfInvention |
High Pressure, High Power Plasma Activated Conformal Film Deposition |
| abstract |
Methods and apparatus are provided for depositing a film on a substrate surface that includes a plasma assisted surface influence reaction in which the film is grown during one or more reactant adsorption and reaction cycles. Embodiments disclosed herein relate to methods and apparatus for conformal film deposition and atomic layer deposition reactions that result in high uniform films with low particle contamination. In accordance with various embodiments, the methods and apparatus include plasma generation using high deposition chamber pressure and high RF power. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220047948-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160075331-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021221862-A1 |
| priorityDate |
2012-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |