http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140012935-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_19be6ea8a91aa27113ac9c0a0c449904 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-278 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 |
| filingDate | 2011-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f441a1dd834b7ef3a9618ad9aa4c018b |
| publicationDate | 2014-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140012935-A |
| titleOfInvention | Methods of synthesizing materials, in particular diamond, by chemical vapor deposition, and apparatus for applying the method |
| abstract | A method of synthesizing a material by chemical vapor deposition (CVD), in which a plasma is generated in a vacuum chamber near a substrate, and carbon retaining material and H 2 are introduced into the chamber to form reactive carbon in the form of unsaturated molecules or radicals in the chamber. A gas comprising a substance containing atoms is generated and from which the synthesis of the material is carried out, using the electromagnetic and inelastic diffusion spectra of the solid material to be synthesized, in reactions which result in the formation of a solid material to be synthesized from these spectra. Contributing absorption frequencies are adopted, energy lines are produced in the form of a photon beam having an amount of energy determined by each of the frequencies corresponding to the absorption and inelastic diffusion frequencies, and the photon beam is injected into a plasma to Depending on the energy state, the energy corresponding to these energy states The absorption of photons is carried out by the material held by the reactive carbon atoms. |
| priorityDate | 2010-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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