http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140011864-A

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fa9d65613e0e265d4ce349201e86eff
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-90
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filingDate 2012-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f722b4e9bd65ceb432e63ff6fe0cb69
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publicationDate 2014-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140011864-A
titleOfInvention Precursors for deposition of gst thin film
abstract The present invention relates to a precursor for depositing a GST thin film, the precursor is represented by the following formula (1). [Chemical Formula 1] (In Formula 1, R1 is C1 ~ C6 alkyl, R2 is C1 ~ C6 alkyl, R3 is C1 ~ C6 alkyl, M is Se or Te) The precursor can simplify the deposition process and increase the deposition efficiency.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210157716-A
priorityDate 2012-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 24.