abstract |
This invention is a composition for zinc oxide type film formation, the manufacturing method of a zinc oxide type film, and a zinc compound containing the zinc compound represented by following General formula (1) as an essential component. (In Formula (1), R 1 and R 2 independently represent an alkyl group having 1 to 4 carbon atoms.) According to the present invention, a composition for forming a zinc oxide based film capable of forming a high quality zinc oxide based film having transparency, homogeneity and conductivity at a low temperature of 300 ° C or lower is provided. |