| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0894 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-087 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J15-00 |
| filingDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b0558359719f6d7313e5fba8c520b52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e34f65205e8947baa2f4f42652c296a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe7fc2731cf5f571c432fac80b3b858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1203054a62514a1caf91dd80c341845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e44dfc4530920066a89f42c7d24257c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7fe45588db90949e20f48ad92f3227c |
| publicationDate |
2013-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130138033-A |
| titleOfInvention |
Siemens reactor comprising plasma generator and method for manufacturing polysilicon using the same |
| abstract |
The present invention relates to a siemens reactor with a plasma generator and, more specifically, to a siemens reactor which is reacted at atmospheric pressure by installing the plasma generator inside the siemens reactor and which can save energy by increasing a dissociation rate of reaction gas. |
| priorityDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |