http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130133899-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76ba102ea9c02b6633d64bf09c5b89a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba54db1bfe2fae432fc2791a738cba4d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2012-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_061775b9401c28d9c639a8da5d3d5066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_874f1d9e8df67103c5753eb7b77e3c04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ec15c3b2e411366394b0920a2470ae7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1334ef8f6152543d04e0a58e1b98817 |
| publicationDate | 2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130133899-A |
| titleOfInvention | Chemical Mechanical Polishing of Surfaces containing Group III Nitride |
| abstract | A method of chemical mechanical polishing a substrate having a group III nitride containing surface includes preparing a slurry composition for chemical mechanical polishing. The slurry composition comprises a slurry solution comprising an aqueous carrier and an oxidant containing a transition metal element or a per-based compound. The slurry solution includes at least one component for reacting with the group III nitride containing surface to produce the soft group III nitride containing surface. The group III nitride containing surface is contacted with the slurry composition by a pad to form a soft group III nitride containing surface. The pad is moved relative to the soft group III nitride containing surface and at least a portion of the soft group III nitride containing surface is removed. |
| priorityDate | 2011-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 87.