http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130133716-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2013-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d62bca5351c77b388a2e9252a0d72d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23d7db299bd273b2061d12a2a86c7953 |
| publicationDate | 2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130133716-A |
| titleOfInvention | Transmission device and its use |
| abstract | The delivery device includes an inlet port and an outlet port. The delivery device includes an inlet chamber and an outlet chamber, wherein the outlet chamber is located opposite the inlet chamber and is in fluid communication with the inlet chamber through the cone region. The outlet chamber includes a maze that allows vapor of the solid precursor compound to exit the delivery device through the outlet port while at the same time preventing solid particles of the solid precursor compound contained in the delivery device from leaving the delivery device. |
| priorityDate | 2010-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 53.