http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130130458-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd3cc3c169eb80c23d5d53984fe68da |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042 |
| filingDate | 2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11bd8627007ed4c3dce100999a5a3eb1 |
| publicationDate | 2013-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130130458-A |
| titleOfInvention | Flexible Silicon Wire Manufacturing Equipment |
| abstract | The flexible silicon wire manufacturing apparatus of the present invention includes a reaction chamber for coating silicon on a base wire, a first antenna coil installed at one side of the reaction chamber and receiving radio frequency power, and the first antenna having the reaction chamber therebetween. A second antenna coil installed opposite to the coil and electrically grounded, a first power supply supplying radio frequency power to the first antenna coil, an impedance matcher connected between the antenna coil pair and the first power supply, And a gas supply source supplying a reaction gas for silicon coating to the reaction chamber, and an exhaust pump connected to the reaction chamber to exhaust the gas. In the flexible silicon wire manufacturing apparatus of the present invention, the base wire continuously proceeds inside the reaction chamber, and the silicon thin film is coated by the plasma reaction while induction heating or self-heating is performed. Thus, high-speed production is possible and high-speed silicon film coating is achieved by heating the base wire by induction heating while progressing at high speed. |
| priorityDate | 2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.