| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2013-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc6f1daf3fc3f3add847f8a459ccd55e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e78bdd6c25586c14003ca6e6a7350a33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04197a089ce32423929b8c5ab05df04c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_646a296935e70e6d967f4effba5bb71d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a376539afdd209080008d481aad2ee95 |
| publicationDate |
2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130126536-A |
| titleOfInvention |
Chemical mechanical polishing compositions with chemical additives and methods of using the same |
| abstract |
The present invention relates to chemical-mechanical polishing (CMP) compositions containing chemical additives and methods of using CMP compositions. CMP compositions include abrasives; Chemical additives; Liquid carriers; Optionally an oxidizing agent; pH buffers and salts; Surfactants and biocides. CMP compositions and methods of using the same may include enhanced removal rates for "SiC", SiN "and" SiC x N y "films;for" SiC "for SiO 2 , for" SiC "for" SiN ", Or provides enhanced adjustable selectivity for "SiC x N y ", where x ranges from 0.1 wt% to 55 wt% and y ranges from 0.1 wt% to 32 wt% with respect to SiO 2 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10217645-B2 |
| priorityDate |
2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |