abstract |
A plurality of nozzles 120A to 120C for dropping the functional liquid onto the substrate, and at least a portion of which is partitioned by a side wall 121 composed of piezoelectric elements 123-1 to 123-4, and connected to each of the nozzles. Liquid ejecting heads provided with liquid chambers 122A to 122C, for shearing piezoelectric elements to drop droplets; And a conveying unit for relatively moving the substrate and the liquid ejecting head. The nozzles provided in the liquid discharge head are grouped into three or more groups (group of nozzles 120A, group of nozzles 120B, and group of nozzles 120C) such that adjacent nozzles belong to different groups. The liquid is dropped only from nozzles belonging to the same group at the same dropping timing, and the motion of the piezoelectric elements is controlled to discretely deposit the liquid on the substrate. |