http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130121721-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2013-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b8a67ad410453d6db3bb7a3e392cd82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a19bab5befaea03c2ed8c46d1b03f337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e835ceba29ff5d76ca2fce0449b29821 |
| publicationDate | 2013-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130121721-A |
| titleOfInvention | Slurry, polishing liquid set, polishing liquid, gas polishing method and gas |
| abstract | The polishing liquid according to the present embodiment contains an oxidizing agent, an additive (except for the above oxidizing agent), abrasive grains, and water, and the abrasive grains comprise a hydroxide of a tetravalent metal element, and the following (a) and (b) At least one of the following conditions is satisfied. (a) The abrasive provides 1.00 or more of absorbance with respect to the light of wavelength 400nm in the aqueous dispersion which adjusted the content of the abrasive grain to 1.0 mass%. (b) The abrasive provides 1.000 or more of absorbance with respect to the light of wavelength 290nm in the aqueous dispersion which adjusted the content of the abrasive grain to 0.0065 mass%. |
| priorityDate | 2012-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.