http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130118830-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa85b9509fe8e25d0162494c3a8bd37a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2013-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ccdae3f6313079cc918d8208a9280e7 |
| publicationDate | 2013-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130118830-A |
| titleOfInvention | Group 4 transition metal-containing precursor compound, preparation method thereof, precursor composition comprising the same, and method for depositing thin film using same |
| abstract | The present application relates to a Group 4 transition metal-containing precursor compound, a method for preparing the precursor compound, a precursor composition for thin film deposition including the precursor compound, and a method for depositing a thin film using the precursor compound. |
| priorityDate | 2012-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.