http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130115847-A

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filingDate 2012-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbd5545dc1ccbfa59e2a5c4384b305ac
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publicationDate 2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130115847-A
titleOfInvention Tungsten Carbide of 2D Nanostructure and Manufacturing Method Thereof
abstract According to the present invention, tungsten carbide of two-dimensional nanostructures capable of synthesizing various types of tungsten carbides, particularly nanowall tungsten carbides, is controlled by controlling the supersaturation level during growth of tungsten carbides. And a method of manufacturing the two-dimensional nanostructured tungsten carbide according to the present invention using a chemical vapor deposition process in which hydrogen plasma is applied, the two-dimensional nanostructured tungsten on the nanocrystalline diamond thin film. Characterized in that the carbide is produced, the chemical vapor deposition process, the hydrogen plasma is applied, comprising a substrate having a nanocrystalline diamond thin film formed on the anode in the chamber, the surface of the tungsten cathode carbonized on the surface of the substrate spaced apart With the hydrogen plasma in the chamber It is.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018093178-A1
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