| abstract |
The present invention relates to a method for preparing silicon chloride by separating and recovering silicon carbide from waste silicon sludge generated during semiconductor manufacturing. Through the method for producing silicon chloride from the silicon sludge according to the present invention, the oil, iron, and silicon contained in the silicon sludge may be removed, and silicon carbide may be selectively separated and silicon chloride may be prepared, and in the manufacture of silica, silicon, etc. It is possible to produce a high-purity silicon chloride that can be recycled as a raw material. |