http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130099874-A

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F02C7-20
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
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filingDate 2013-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c99ff7825f377e8552bc874fb032128
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publicationDate 2013-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130099874-A
titleOfInvention Device testing device
abstract An element inspecting apparatus according to an embodiment of the present invention is an element inspecting apparatus for accurately setting and confirming a pressing position of an element pressing tool and picking up the element and moving the element to a pressing position by linear movement, And a first vertical movement device for linearly moving the element pressing tool to the pressing position by the cam member, and a second vertically moving device for linearly moving the element pressing part relative to the test part, A second vertical movement device for detecting a load applied to the test part by the second vertical movement device when the device pressing tool is brought into contact with the test part by the second vertical movement device, And a control unit for determining the position of the element pressing tool when the reference load is applied as the pressing position.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230031399-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160040002-A
priorityDate 2012-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 22.