http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130090886-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249961 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-04 |
| filingDate | 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38bb05dc5e51a2764f3bfd3fa886a8a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3d19378d1670be39f54490fb43fe290 |
| publicationDate | 2013-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130090886-A |
| titleOfInvention | Thermal Spray Coatings for Semiconductor Applications |
| abstract | The present invention relates to thermal spray coatings on metal or nonmetal substrates. Thermal spray coatings include ceramic coatings having porosities functionally graded across the ceramic coating thickness. The ceramic coating includes an inner layer and an outer layer. The inner layer has a porosity sufficient to provide a compliant ceramic coating that can be deformed under thermal expansion mismatch between the ceramic coating and the metal or nonmetallic substrate at elevated temperatures at or near the interface of the inner layer and the metal or nonmetallic substrate. The outer layer has a decreasing porosity sufficient to extend from the surface of the inner layer to the surface of the ceramic coating to provide corrosion resistance and / or plasma erosion resistance to the ceramic coating. The invention also relates to a method of protecting metal and nonmetallic substrates by applying a thermal spray coating. Coatings are useful, for example, in semiconductor manufacturing equipment such as integrated circuits, light emitting diodes, displays, and photovoltaics, protection of internal chamber components, and electrostatic chucks. |
| priorityDate | 2010-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.