http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130079462-A

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publicationDate 2013-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130079462-A
titleOfInvention Etch Liquid Composition of Thin Film Transistor Liquid Crystal Display
abstract The present invention relates to an etching liquid composition for etching a copper wiring used in a circuit pattern of a liquid crystal display device. The etchant composition of the present invention includes ammonium persulfate and an azole compound. Since the etchant composition of the present invention does not contain hydrogen peroxide, stability and process margins can be secured, and an excellent tapered etching profile can be obtained.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111270236-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11441071-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150100295-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160005639-A
priorityDate 2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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