http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130069190-A

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filingDate 2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec37cb3c3e54cb8763de7528242e081f
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publicationDate 2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130069190-A
titleOfInvention Tungsten Metal Nanopowder Manufacturing Method Using RF Plasma
abstract Metal nano powder manufacturing method using an RF plasma according to an embodiment of the present invention, supplying an inert gas to the inside of the reaction chamber to replace the inert atmosphere, generating an RF hydrogen plasma inside the reaction chamber, the reaction chamber Charging tungsten trioxide powder therein, evaporating the tungsten trioxide at a high temperature with a hydrogen plasma and simultaneously performing hydrogen reduction to produce vaporized tungsten metal, and condensing or quenching the vaporized tungsten metal to tungsten metal nano Forming a powder may be included. According to the present invention, the RF plasma is operated in a hydrogen reduction atmosphere to hydrogen-reduce tungsten trioxide, which is a metal oxide, and vapor-vaporized to condense using a high temperature plasma to produce tungsten metal nanopowder, thereby simplifying the manufacturing process. Through this, it is possible to improve the productivity of the tungsten metal nanopowder and to reduce the manufacturing cost.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200081723-A
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priorityDate 2011-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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