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publicationDate 2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130068181-A
titleOfInvention Apparatus and method for manufacturing gas phase nanoparticles using electron beam irradiation
abstract Apparatus and method for manufacturing gas-phase nanoparticles using electron beam irradiation at room temperature and pressure with a precursor generator and an electron beam reaction apparatus, coupled to the precursor generator for generating a precursor by a working fluid and the precursor generator And an electron beam processing unit for decomposing precursor vapor introduced from the precursor generating unit to form nanoparticles. By using the apparatus and method for manufacturing the gaseous nanoparticles using the electron beam irradiation as described above, all the devices are operating at room temperature and atmospheric pressure to generate the precursor vapor in the precursor generator by the working fluid and the precursor vapor flowing from the precursor generator Nanoparticles can be formed in an electron beam reactor.
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