http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130060375-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
filingDate 2008-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d63cfce9636dcc04e12e15ea9b71f1a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ec5072a8a8361337d469d41367b408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff37d7ae5f5a9b8fb3f1085678217500
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d0070f5a9361d40dac292c0045992ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db40fca061e5d0de74e48225a8b62379
publicationDate 2013-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130060375-A
titleOfInvention Abrasive solution for metal film and polishing method
abstract Provided is a polishing liquid for a metal film and a polishing method which suppress the occurrence of erosion and seam and have a high flatness of the surface to be polished. Abrasive grains, abrasive grains, abrasive grains, abrasive grains, abrasive grains, abrasive grains, abrasive grains, abrasive grains, abrasive grains, abrasive grains,
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015013162-A1
priorityDate 2007-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712565
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1639
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9836978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411738766
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID697993
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID528429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11355992
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9257
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420450134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419796161
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21900283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID516896
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421858897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767842
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526858
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419489300
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421170388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559214
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474097
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14048888
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406908050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID587694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420549279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425742778
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15930777
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414856167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22858111
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411832430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416155127
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415996149
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79204
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421473176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8314
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135408763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415834942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448778112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32743
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID273584
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21960646
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408978443
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421468351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420533490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9793781
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419476272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712472
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412527784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414811179
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413283772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421062847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14456
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421657581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4093
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420453144
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14455226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414879359
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420454520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407268020
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8697
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15771
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410493711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17756
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID30111
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474364
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419761714
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25203914
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452833283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8178
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416195811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415861834
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14796
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136048
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415716906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425823269
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414813173
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878626
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420553363
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414813175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420109993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573776
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426155427
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420064666
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420455388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426148431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID65360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID636456
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22495263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID525763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID525746
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID169042
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2733908
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28117
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407932856
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457558965
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17785624
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10130118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415994536
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421352388
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19042707
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415994527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410481028
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14178861
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415831110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422135252
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID482532689
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12713
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416069178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2784952
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411613031
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID125468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410492784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525472
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID726938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415716843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419575161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412833275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10130103
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24341

Total number of triples: 209.