| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5351c62aee4203f2be2944f21a6def2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-035218 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00 |
| filingDate |
2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_144e2e9d4dc37738940d959b0358d999
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0218f0a9d5fc9ddd398666d77e50fac4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2313a724afb4ee1f2f149a4e239f6f55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e57c15c1b73936f9cf353a4bfe1511e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_800b1ec6fe69c248c9fdae68161f2ec3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a37e9e0ad2e82134ee1434d98112b06c |
| publicationDate |
2013-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130037431-A |
| titleOfInvention |
Tubular Monocrystalline Silicon Nanostructures and Manufacturing Method Thereof |
| abstract |
The present invention relates to a method for producing a single-crystal silicon nanostructure of a tubular vertical columnar structure on a silicon substrate, in particular, such as metal deposition-> rapid heat treatment-> dry etching (RIE) without using a conventional photolithography process The present invention relates to a method of manufacturing a tubular nanostructure that can effectively produce a tubular silicon nanostructure having a large surface ratio per volume and a superhydrophobic property on a large-scale silicon substrate through a three-step simple batching process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109941959-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109941959-A |
| priorityDate |
2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |