http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130034606-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38 |
| filingDate | 2012-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fead6a33108490fc9a8b8b99a36e91a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1eb53b5ea415e3380f6200efeb9e197d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e697d257ba6e7c52ca2b59198fdc22a |
| publicationDate | 2013-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130034606-A |
| titleOfInvention | Glass substrates for mask blanks, substrates with multilayer reflective films, mask blanks and masks, and methods of manufacturing the same |
| abstract | The present invention provides a mask blank glass substrate having a high smoothness on the surface of the substrate, a reference mark for improving the detection accuracy such as a defect position, and further regenerating (reusing) the glass substrate. On the main surface of the side where the transfer pattern of the mask blank glass substrate 11 is formed, the underlayer 21 which reduces the surface roughness of the said board | substrate 11 or reduces the surface defect of the board | substrate 11 is formed. The surface of the base layer 21 is a precisely polished surface, and a reference mark 22 serving as a reference for the defect position in the defect information is formed on the base layer 21. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220094618-A |
| priorityDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.