abstract |
The present invention relates to a laser optical head (10) configured for use in a laser scribing device comprising a diffractive optical element (11), a condensing objective lens (13) and an adjusting means (21), the diffractive optical element (11) And the condenser objective 13 is arranged to be spaced apart from each other at one common optical axis 16, and the adjusting means 21 rotates the diffractive optical element 11 in a third plane perpendicular to the optical axis 16. It is configured to. The present invention provides a reduction in leakage current of thin film solar cells. |