| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-444 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 |
| filingDate |
2011-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c681426d909773d7765656d36c409bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_636c4ab4824e30964fd4ca55db7f44dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3b5b8f26e515be85f6dec9f9a4ca5bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36d473150e470879837738f0c72702d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e66baa372bb85ae5cc3e8bcb97214191
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8071d35e099c977f29cd9f067bcbcb11 |
| publicationDate |
2013-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130030104-A |
| titleOfInvention |
Numerical control unit, variable optical probe and depth scanning method using the same |
| abstract |
A numerical aperture control unit and a variable optical probe employing the same are disclosed. The disclosed NA control unit includes an opening adjustment unit in which an opening through which light is transmitted is adjusted; And a focus adjusting unit focusing the light passing through the opening and adjusting a focal length. The disclosed variable optical probe includes an optical transmitter; A collimator for collimating the light transmitted through the light transmission unit into parallel light; A NA control unit focusing light on a sample to be inspected and whose NA is controlled; And a scanner for changing a path of light transmitted through the light transmission unit so that light passing through the NA control unit scans a predetermined region of the sample. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9411155-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180104248-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9880381-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023010029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9128350-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102258893-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160117720-A |
| priorityDate |
2011-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |