abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic member, a probe member formed by using a ceramic member, and a method for producing a ceramic member, which include enstatite and boron nitride as constituents, wherein the boron nitride is oriented in one direction. The ceramic member has an orientation index of 0.8 or more. Thereby, the ceramic member which has free machinability, has a thermal expansion coefficient close to silicon, and has high intensity | strength, the probe holder formed using this ceramic member, and the manufacturing method of a ceramic member can be provided. |