abstract |
Disclosed are a battery electrode and a method of manufacturing the same. The battery electrode according to the present invention includes a silicon thin film and a silicon nanostructure regularly arranged or formed on top of the silicon thin film, and extends the active area to reduce internal resistance and charge / discharge by expanding the active region. It has improved cycle performance, high energy density, fast charge / discharge characteristics, and cycle retention characteristics through stress relaxation through reduced volume change during cycles, easy transport of charges, and the like. In addition, the method for manufacturing a battery electrode according to the present invention can easily and easily form a nano-sized structure having various sizes and shapes on top of the silicon thin film through laser interference lithography and dry etching. |