| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2011-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d8bbd2938fd8f7e5579871219c759e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92ab7ce0b03f328be97bc1f8044d6b24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2188cce85f627e039f1fa290a99022d8 |
| publicationDate |
2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130016214-A |
| titleOfInvention |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film and pattern forming method using same |
| abstract |
(A) Resin which can be decomposed by the action of an acid and can increase the solubility in alkaline developing solution; (B) compounds capable of generating an acid upon irradiation with actinic light or radiation; (C) basic compounds; And (D) an actinic ray-sensitive or radiation-sensitive resin composition comprising a specific compound comprising at least two specific alicyclic hydrocarbon groups substituted with hydroxyl groups, a resist film and a pattern forming method using the same. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180038397-A |
| priorityDate |
2010-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |