http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130016179-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae372ddaa494f2face39592b0429cc16 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00206 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29674b1a99eac39cab147533737a1095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35e18104162a5fa4b131f016dc418962 |
| publicationDate | 2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20130016179-A |
| titleOfInvention | Manufacturing method of micro nano combination structure and manufacturing method of optical device in which micro nano combination structure is integrated |
| abstract | The present invention relates to a method for manufacturing a micro nanocomposite structure and a method for manufacturing an optical device incorporating the micro nanocombination structure, comprising the steps of forming a microstructure on a substrate and depositing a metal thin film on the substrate on which the microstructure is formed. And transforming the metal thin film into metal particles by heat treatment, and forming the wedge-shaped antireflective nanostructure having a period below the wavelength of light on the upper surface of the substrate on which the microstructure is formed. By etching the entire surface of the substrate on which the microstructure is formed, the manufacturing process is simple, and it is possible to minimize the amount of reflection of light generated by the refractive index difference between the air and the semiconductor material, as well as in the field of optical devices. There is an effect that can be easily applied. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9453283-B2 |
| priorityDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.